Graphene gate electrode for MOS structure-based electronic devices.

作者: Jong Kyung Park , Seung Min Song , Jeong Hun Mun , Byung Jin Cho

DOI: 10.1021/NL202983X

关键词:

摘要: We demonstrate that the use of a monolayer graphene as a gate electrode on top of a high-κ gate dielectric eliminates mechanical-stress-induced-gate dielectric degradation, resulting …

参考文章(27)
Chih-Yuan Lu, Kuang-Yeu Hsieh, Rich Liu, Future challenges of flash memory technologies Microelectronic Engineering. ,vol. 86, pp. 283- 286 ,(2009) , 10.1016/J.MEE.2008.08.007
K. Nagashio, T. Nishimura, K. Kita, A. Toriumi, Metal/graphene contact as a performance Killer of ultra-high mobility graphene analysis of intrinsic mobility and contact resistance international electron devices meeting. pp. 1- 4 ,(2009) , 10.1109/IEDM.2009.5424297
Kirk Prall, Krishna Parat, 25nm 64Gb MLC NAND technology and scaling challenges invited paper 2010 International Electron Devices Meeting. ,(2010) , 10.1109/IEDM.2010.5703300
Y.-M. Lin, C. Dimitrakopoulos, K. A. Jenkins, D. B. Farmer, H.-Y. Chiu, A. Grill, Ph. Avouris, 100-GHz Transistors from Wafer-Scale Epitaxial Graphene Science. ,vol. 327, pp. 662- 662 ,(2010) , 10.1126/SCIENCE.1184289
Seung Min Song, Byung Jin Cho, Investigation of interaction between graphene and dielectrics Nanotechnology. ,vol. 21, pp. 335706- 335706 ,(2010) , 10.1088/0957-4484/21/33/335706
C. Casiraghi, S. Pisana, K. S. Novoselov, A. K. Geim, A. C. Ferrari, Raman Fingerprint of Charged Impurities in Graphene Applied Physics Letters. ,vol. 91, pp. 233108- ,(2007) , 10.1063/1.2818692
S. C. Jain, A. H. Harker, A. Atkinson, K. Pinardi, Edge‐induced stress and strain in stripe films and substrates: A two‐dimensional finite element calculation Journal of Applied Physics. ,vol. 78, pp. 1630- 1637 ,(1995) , 10.1063/1.360257
Fang Chen, Jilin Xia, Nongjian Tao, Ionic screening of charged-impurity scattering in graphene. Nano Letters. ,vol. 9, pp. 1621- 1625 ,(2009) , 10.1021/NL803922M
William D. Nix, Mechanical properties of thin films Metallurgical and Materials Transactions A-physical Metallurgy and Materials Science. ,vol. 20, pp. 2217- 2245 ,(1989) , 10.1007/BF02666659
Jang-Sik Lee, Chang-Seok Kang, Yoo-Cheol Shin, Chang-Hyun Lee, Ki-Tae Park, Jong-Sun Sel, Viena Kim, Byeong-In Choe, Jae-Sung Sim, Jungdal Choi, Kinam Kim, Data Retention Characteristics of Nitride-Based Charge Trap Memory Devices with High-k Dielectrics and High-Work-Function Metal Gates for Multi-Gigabit Flash Memory Japanese Journal of Applied Physics. ,vol. 45, pp. 3213- 3216 ,(2006) , 10.1143/JJAP.45.3213