Thickness dependence of structure and piezoelectric properties at nanoscale of polycrystalline lead zirconate titanate thin films

摘要: Lead zirconate titanate Pb(Zr0.50Ti0.50)O3 (PZT) thin films were deposited by a polymeric chemical method on Pt(111)/Ti/SiO2/Si substrates to understand the mechanisms of phase transformations and effect film thickness structure, dielectric, piezoelectric properties in these films. PZT pyrolyzed at temperatures higher than 350 °C present coexistence pyrochlore perovskite phases, while only grows lower 300 °C. For pyrochlore-free films, small (100)-orientation tendency near film-substrate interface was observed. Finally, we demonstrate existence self-polarization studied The increase with increasing from 200 nm 710 nm suggests that Schottky barriers and/or mechanical coupling are not primarily responsible for observed our