The fabrication of micro-heaters with low-power consumption using SOI and trench structures
作者： Gwiy-Sang Chung
DOI: 10.1007/BF03186106
关键词:
摘要: … Thin-film type Pt-RTD was also integrated on the SOI membrane structure. By forming a trench at a rim of the SOI membrane, the thermal loss due to the conduction was reduced by …
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