Low power gas sensor array on flexible acetate substrate

摘要: In this paper, we present a novel approach of fabricating low-cost and low power gas sensor array on flexible acetate sheets for sensing CO, SO2, H-2 NO2 gases. The has four elements with an integrated microheater which can be individually controlled enabling the monitoring thermal properties characterized by IR imaging are presented. active area 15 mu m x 5 reaches temperature 300 degrees C, consuming 2 mW power, lowest reported substrates. A electrode is patterned top microheater, nanogap (100 nm) created electromigration process. This bridged materials doped platinum, deposited using solution dispensing technique. material characterization completed energy dispersive x-ray analysis. characteristics ZnO V2O5 SnO2 WO3 gases studied at different voltages. bending angles also studied, shows that intact without any breaking upto angle 20 degrees. CO sensitivity 146.2% 1 ppm good selectivity.