Epitaxial Liftoff Technology For OEIC's

摘要: Abstract : Epitaxial liftoff permits the integration of III-V films and devices onto arbitrary material substrates. This paper will review Bellcore's work on optoelectronic optical transmitter receiver LiNbO3, glass, Silicon sapphire In field electronic materials there has been a persistent interest in high quality epitaxial thin film semiconductor layers with crystalline or glass For example, GaAs substrates would allow combination two technologies. led to massive effort lattice mis-matched heteroepitaxial growth. Recently, however, new more flexible approach attracting increasing attention.