Multi-layer film stack for extinction of substrate reflections during patterning
作者： Sean W. King , Khaled A. Elamrawi , Sanjay S. Natarajan
DOI:
关键词:
摘要: A method including introducing a dielectric layer over substrate between an interconnection line and the substrate, comprising plurality of alternating material layers; patterning to substrate. An apparatus devices formed thereon; interlayer base cap layer, layers overlying
lens.org 参考文章(28)
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