Selective epitaxial growth of graphene on SiC
作者： N. Camara , G. Rius , J.-R. Huntzinger , A. Tiberj , N. Mestres
DOI: 10.1063/1.2988645
关键词:
摘要: … We present a method of selective epitaxial growth of few layers … , the sputtering of a thin aluminium nitride (AlN) layer on top of a … The sublimation of few atomic layers of Si from the SiC …
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arxiv.org 参考文章(22)
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