Silicon Oxide Surface Chemistry and Nano-Tribology

摘要: As the contact size involved in mechanical device operations decreases, tiie adsorption of gaseous molecules on surface — which normally ignored macroscopic measurements becomes more important and dominant factors governing contract properties such as adhesion friction. Water can causes high severe wear silicon oxide surfaces. In contrast, alcohol vapor from ambient provide unprecedentedly efficient lubrication effects for operation microelectromechanical systems (MEMS) with sliding contacts. Atomic force microscopy (AFM) is an ideal tool studying fiictional behavior nanoscale asperity The tribological response a nanoasperity was studied AFM presence water or vapor. origin adhesion, friction, changes contacts elucidated through vibrational spectroscopic investigation thickness structure adsorbed layers well theoretical calculations their responses.