Semiconductor device containing thin film capacitor and manufacture method for thin film capacitor
作者： Kazuya Okubo , Shinichi Akiyama , Makoto Nakamura , Kenji Naito
DOI:
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摘要: A thin film capacitor is disposed over a semiconductor substrate. The includes lower electrode at least an upper surface of which made amorphous or microcrystalline metal, dielectric the electrode, and film.
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