Evaluation of Metallic Nano-Lawn Structures for Application in Microelectronic Packaging
作者： Stefan Fiedler , Michael Zwanzig , Ralf Schmidt , Ellen Auerswald , Matthias Klein
关键词:
摘要: New applications of template-generated structures and surfaces are foreseen in microelectronic joining, photonics, analytical chemistry. They require a special tuning morphological topological parameters. High-resolution imaging techniques allow for optimising surface properties grain size metal-rod decorated surfaces. Submicron wires more complex "lawn"-structures with diameters 600 ? 50 nm have been produced by galvanic deposition at porous polymer templates. Their application low-temperature interconnect formation is under evaluation. First results indicate that single-metal layered "nano-lawn" can be attractive microsystem technology general, but also chemistry related fields. Template discussed experimental approaches to use gold nano-lawn presented. The development new materials appropriate will useful future packaging technologies (micro-)electronics come.
sci-hub.se 参考文章(32)
E. Ferain, R. Legras, Pore shape control in nanoporous particle track etched membrane Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 174, pp. 116- 122 ,(2001) , 10.1016/S0168-583X(00)00455-9
C. R. Sides, C. R. Martin, Nanostructured Electrodes and the Low‐Temperature Performance of Li‐Ion Batteries Advanced Materials. ,vol. 17, pp. 125- 128 ,(2005) , 10.1002/ADMA.200400517
D. Dobrev, J. Vetter, R. Neumann, N. Angert, Conical etching and electrochemical metal replication of heavy-ion tracks in polymer foils Journal of Vacuum Science & Technology B. ,vol. 19, pp. 1385- 1387 ,(2001) , 10.1116/1.1381066
C. Schönenberger, B. M. I. van der Zande, L. G. J. Fokkink, M. Henny, C. Schmid, M. Krüger, A. Bachtold, R. Huber, H. Birk, U. Staufer, TEMPLATE SYNTHESIS OF NANOWIRES IN POROUS POLYCARBONATE MEMBRANES: ELECTROCHEMISTRY AND MORPHOLOGY Journal of Physical Chemistry B. ,vol. 101, pp. 5497- 5505 ,(1997) , 10.1021/JP963938G
S. H. Jo, J. Y. Lao, Z. F. Ren, R. A. Farrer, T. Baldacchini, J. T. Fourkas, Field-emission studies on thin films of zinc oxide nanowires Applied Physics Letters. ,vol. 83, pp. 4821- 4823 ,(2003) , 10.1063/1.1631735
R. L. Fleischer, J. R. M. Viertl, P. B. Price, Filters with Continuously Adjustable Hole Size Review of Scientific Instruments. ,vol. 43, pp. 1708- 1709 ,(1972) , 10.1063/1.1685534
B Hecht, J Farahani, P Mühlschlegel, HJ Eisler, DW Pohl, Olivier JF Martin, Resonant optical antennas. Science. ,vol. 308, pp. 1607- 1609 ,(2005) , 10.1126/SCIENCE.1111886
Laurent Vila, Pascal Vincent, Laurence Dauginet-De Pra, Gilles Pirio, Eric Minoux, Laurent Gangloff, Sophie Demoustier-Champagne, Nicolas Sarazin, Etienne Ferain, Roger Legras, Luc Piraux, Pierre Legagneux, Growth and field-emission properties of vertically aligned cobalt nanowire arrays Nano Letters. ,vol. 4, pp. 521- 524 ,(2004) , 10.1021/NL0499239
M. Lindeberg, K. Hjort, Interconnected nanowire clusters in polyimide for flexible circuits and magnetic sensing applications Sensors and Actuators A-physical. ,vol. 105, pp. 150- 161 ,(2003) , 10.1016/S0924-4247(03)00088-8
Jinsub Choi, Guido Sauer, Kornelius Nielsch, Ralf B. Wehrspohn, Ulrich Gösele, Hexagonally Arranged Monodisperse Silver Nanowires with Adjustable Diameter and High Aspect Ratio Chemistry of Materials. ,vol. 15, pp. 776- 779 ,(2003) , 10.1021/CM0208758