作者: K. Niwase , Y. Kakimoto , I. Tanak , T. Tanabe
DOI: 10.1016/0168-583X(94)96194-8
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摘要: Abstract Type Ib diamond and highly orientated graphite were irradiated with 25 keV D+ or He+ ions at room temperature to several doses, examined by laser Raman spectroscopy. The absolute intensity of the peak 1330 cm−1 gradually decreased increasing dose, finally disappeared a critical very broad appeared instead, indicating an amorphization diamond. Though dose for was larger than that He+, dpa calculated energy deposition both nearly same, which means chemical effect implanted species on is negligible. Nevertheless, certain difference observed in spectra amorphized specimen between irradiation. spectrum quite similar amorphous hydrogenated carbon (a-C:H) component, due C-D bond formation, around 1550 only A also seen This leads us conclude structures under irradiation are a-C:H.