High coercivity of CoCrTa on a very thin Cr underlayer
作者： J.C. Lin , C.D. Wu , J.M. Sivertsen
DOI: 10.1109/20.50483
关键词:
摘要: RF sputtered CoCrTa films (Co-15 wt.% Cr-4.7 Ta) deposited on various thicknesses of Cr underlayer (200 AA to 800 AA) for longitudinal magnetic recording were investigated. A coercivity 1500 Oe can be easily obtained a 200-AA with low argon pressure (4 mtorr) and high substrate bias (-100 V). Emphasis has been placed the influence (1010) texture formation in-plane coercivity. Microstructure observation revealed by TEM shows that grain size structure changed thickness underlayer. Several mechanisms are proposed explain experimentally observed phenomena effects change this CoCrTa/Cr film. >
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