Mems sensor device with multi-stimulus sensing and method of fabrication
作者： Babak A. Taheri , James S. Bates , Lianjun Liu , Mamur Chowdhury , David J. Monk
DOI:
关键词:
摘要: A device (20) includes sensors (30, 32, 34) that sense different physical stimuli. Fabrication (90) entails forming (92) a structure (22) to include the and coupling (150) cap (24) with so are interposed between substrate layer (28) of structure. further ports (38, 40) in such one port (38) exposes element (44) sensor (30) an external environment (72), another (40) temporarily (34) environment. seal (26) is attached hermetically sealed by (46) aligned (38).
lens.org 参考文章(16)
Goksen Yaralioglu, Joseph Seeger, Steve Nasiri, Bruno Borovic, Integrated multiaxis motion sensor ,(2008)
Yizhen Lin, Todd F. Miller, Woo Tae Park, David J. Monk, Vertically integrated MEMS sensor device with multi-stimulus sensing ,(2009)
Bernhard Schmid, Stefan Günthner, Component and method for producing a component ,(2012)
Mark E. Schlarmann, Yizhen Lin, Hemant D. Desai, Woo Tae Park, MEMS pressure sensor device and method of fabricating same ,(2010)
Joseph Seeger, Bruno Borovic, Extension-mode angular velocity sensor ,(2015)
Guiti Zolfagharkhani, Jason Goodelle, Jan H. Kuypers, Klaus Juergen Schoepf, David M. Chen, Pritiraj Mohanty, Reimund Rebel, Microelectromechanical systems (mems) resonators and related apparatus and methods ,(2012)
Gary Yama, Markus Ulm, Aaron Partridge, Wilhelm Frey, Matthias Metz, Markus Lutz, Brian Stark, Anti-stiction technique for electromechanical systems and electromechanical device employing same ,(2005)
Mark E. Schlarmann, Yizhen Lin, Hemant D. Desai, Woo Tae Park, Mems sensor device with multi-stimulus sensing ,(2012)
Akira Egawa, Takeshi Uchiyama, Mitsuo Yarita, Dynamic amount sensor ,(2007)
Paul Felice Reboa, Chien-Hua Chen, Charles C. Haluzak, Microelectromechanical system device and method for preparing the same for subsequent processing ,(2006)