Laser Processing of Integrated Optic Waveguides for Photonic Applications

作者: Anadi Mukherjee , Ben Joy Eapen , Swapan K. Baral

DOI: 10.1007/978-94-009-0197-1_47

关键词:

摘要: Very low loss integrated waveguides of optically transparent materials are desirable for many passive and active photonic waveguide devices. In the past, there have been numerous reports on several fabrication techniques applied to organic, inorganic semiconducting materials. This article focuses laser optic organic Choice material processing technique application specific. While glass appropriate high temperature environments such as space applications, polymers not. The flexibility film deposition however very attractive applications at moderate temperatures. Waveguide may be broadly classified under two categories, namely, lithographic patterning resist-free patterning. Lithographic is usually followed by ion diffusion or some form etching (wet chemical dry). Although lithographically patterned an established technology, it involves time consuming mask transfer process use chemicals that not environmentally safe. Laser structures dominant technique, which offers flexibility, reproducibility rapid manufacturing conditions, besides being Also, described in a later section, allows variation thickness refractive index across wafer needed improving coupling bending losses. will describe pulsed cw UV commonly used channel applications. Our research effort unique (0.08 dB/cm) polymethylmethacrylate (PMMA) given detail.

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