Evaluation device and evaluation method for substrate mounting apparatus and evaluation substrate used for the same
作者： Yasuharu Sasaki
DOI:
关键词:
摘要: There are provided an evaluation device and method for a substrate mounting apparatus capable of simply evaluating temperature control function the depending on conditions or circumstances used same. The holds target mounted surface controls substrate. includes evacuable airtight chamber in which is provided; instead self-heating resistance heater; measurement unit measures
lens.org 参考文章(39)
Walter Rothmund, Thomas Meisel, Ruediger Braun, Albert Braig, Werner Scherber, Walter Schwarzott, Layer system with a controllable heat emission ,(1995)
Matthias Zieger, Axel Schmidt, Frank-Michael Werner, Claus Dietrich, Jorg Kiesewetter, Stefan Schneidewind, Test apparatus for testing substrates at low temperatures ,(2003)
Timothy Blomgren, Michael W. Huebner, Jacob C. Chang, Kevin Y. Yasumura, Increasing thermal isolation of a probe card assembly ,(2008)
Karl F. Leeser, Method and apparatus for controlling chucking force in an electrostatic chuck ,(1999)
Jae-Il Lee, Hyun-seop Shim, Ju-il Kang, Do-young Kam, Seong-goo Kang, Jun-Ho Lee, Ki-Sang Kang, Handlers for testing semiconductor devices that are capable of maintaining stable temperature in test environments ,(2007)
Karsten Stoll, Axel Schmidt, Stojan Kanev, Joerg Kiesewetter, Michael Teich, Method for testing a test substrate under defined thermal conditions and thermally conditionable prober ,(2008)
Ping-Chuan Wang, Charles J. Montrose, Method and apparatus for testing a micro electromechanical device ,(2003)
Karsten Stoll, Andrej Rumiantsev, Stojan Kanev, Steffen Schott, Chuck for supporting and retaining a test substrate and a calibration substrate ,(2009)
Ichiro Nomura, Yoshikazu Banno, Takeo Ono, Hidetoshi Suzuki, Toshikazu Ohnishi, Masanori Mitome, Masato Yamanobe, Electron-emitting device, electron source and image-forming apparatus ,(2001)