Etching of Silicon (111) and (100) Surfaces in HF Solutions: H-Termination, Atomic Structure and Overall Morphology

作者: Y. J. Chabal

DOI: 10.1557/PROC-259-349

关键词:

摘要: … structures) rapidly after various etching and processing steps. … associated with each hydride structure, starting from the … With these mode assignments the structure of these H-terminated …

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