The Ir/Si/ErSi 2 tunable infrared photoemission sensor

作者: I. Sagnes , Y. Campidelli , P. A. Badoz

DOI: 10.1007/BF02670650

关键词:

摘要: We present a new type of metal-silicon-metal infrared detector, the tunable photoemission sensor (TIPS), whose photoresponse can be tuned by an externally applied bias. The physical detection process this device is based on internal optically excited carriers between two metal layers vertical Ir/Si/ErSi2/Sisub system. show that experimental TIPS cut-off wavelength shifted from around 2 urn to more than 6 with quantum efficiency 3% at |i,m and 1% 3 when bias less IV Ir electrode. such heterostructure quantitatively explained using model derived Fowler formalism, taking into account dependence light absorbed in each metallic film four different processes structure. Dark current measurements structure indicate high detectivities (above 1010 cm√Hz /W 2µm 125K) may expected device.

参考文章(16)
F. (edit). Abeles, Optical Properties of Solids ,(1972)
B.-Y. Tsaur, C.K. Chen, S.A. Marino, Long-wavelength Ge/sub x/Si/sub 1-x//Si heterojunction infrared detectors and 400*400-element imager arrays IEEE Electron Device Letters. ,vol. 12, pp. 293- 296 ,(1991) , 10.1109/55.82065
L. Pahun, Y. Campidelli, F. Arnaud d’Avitaya, P. A. Badoz, Infrared response of Pt/Si/ErSi1.7 heterostructure: Tunable internal photoemission sensor Applied Physics Letters. ,vol. 60, pp. 1166- 1168 ,(1992) , 10.1063/1.107393
B.-Y. Tsaur, C.K. Chen, B.A. Nechay, IrSi Schottky-barrier infrared detectors with wavelength response beyond 12 mu m IEEE Electron Device Letters. ,vol. 11, pp. 415- 417 ,(1990) , 10.1109/55.62974
F. Arnaud d'Avitaya, P.-A. Badoz, Y. Campidelli, J.A. Chroboczek, J.-Y. Duboz, A. Perio, J. Pierre, Growth, characterization and electrical properties of epitaxial erbium silicide Thin Solid Films. ,vol. 184, pp. 283- 293 ,(1990) , 10.1016/0040-6090(90)90424-C
W.F. Kosonocky, F.V. Shallcross, T.S. Villani, J.V. Groppe, 160 × 244 Element PtSi Schottky-barrier IR-CCD image sensor IEEE Transactions on Electron Devices. ,vol. 32, pp. 1564- 1573 ,(1985) , 10.1109/T-ED.1985.22165
J. de Sousa Pires, F. d’Heurle, H. Norde, S. Petersson, P. A. Tove, Measurements of the rectifying barrier heights of various rhodium silicides with n‐silicon Applied Physics Letters. ,vol. 35, pp. 202- 204 ,(1979) , 10.1063/1.91412
T. L. Lin, T. George, E. W. Jones, A. Ksendzov, M. L. Huberman, Elemental boron‐dopedp+‐SiGe layers grown by molecular beam epitaxy for infrared detector applications Applied Physics Letters. ,vol. 60, pp. 380- 382 ,(1992) , 10.1063/1.106663