High density and patternable growth of silicon, germanium and alloyed SiGe nanowires by a rapid anneal protocol
作者： M. Bezuidenhout , T. Kennedy , S. Belochapkine , Y. Guo , E. Mullane
DOI: 10.1039/C5TC01389E
关键词:
摘要: We report the formation of silicon, germanium and alloyed Si1−xGex nanowires by direct pyrolysis liquid precursors on a heated substrate in an inert environment. The form high density with fast reaction time. use SEM, HRTEM, EDX-STEM, Raman spectroscopy to carry out depth study into population distribution nanowires. method was sufficiently adaptable pattern nanowire growth using standard dry film lithography techniques. Additionally, we further show that writing copper metal pen deposited sufficient catalyst allow localised constrained treated areas.
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sci-hub.se 参考文章(56)
Ali Javey, Zachery A. Jacobson, Robert L. Alley, Zhiyong Fan, Haleh Razavi, Roie Yerushalmi, Johnny C. Ho, Wafer-scale assembly of highly ordered semiconductor nanowire arrays by contact printing. Nano Letters. ,vol. 8, pp. 20- 25 ,(2008) , 10.1021/NL071626R
Kibum Kang, Gil Ho Gu, Dong An Kim, Chan Gyung Park, Moon-Ho Jo, Self-Organized Growth of Ge Nanowires from Ni−Cu Bulk Alloys Chemistry of Materials. ,vol. 20, pp. 6577- 6579 ,(2008) , 10.1021/CM802184A
Xianmao Lu, Tobias Hanrath, Keith P. Johnston, Brian A. Korgel, Growth of Single Crystal Silicon Nanowires in Supercritical Solution from Tethered Gold Particles on a Silicon Substrate Nano Letters. ,vol. 3, pp. 93- 99 ,(2003) , 10.1021/NL0202307
Andrew B. Greytak, Lincoln J. Lauhon, Mark S. Gudiksen, Charles M. Lieber, Growth and transport properties of complementary germanium nanowire field-effect transistors Applied Physics Letters. ,vol. 84, pp. 4176- 4178 ,(2004) , 10.1063/1.1755846
Hugh Geaney, Calum Dickinson, Weihao Weng, Christopher J. Kiely, Christopher A. Barrett, Robert D. Gunning, Kevin M. Ryan, Role of Defects and Growth Directions in the Formation of Periodically Twinned and Kinked Unseeded Germanium Nanowires Crystal Growth & Design. ,vol. 11, pp. 3266- 3272 ,(2011) , 10.1021/CG200510Y
S. V. Thombare, A. F. Marshall, P. C. McIntyre, Size effects in vapor-solid-solid Ge nanowire growth with a Ni-based catalyst Journal of Applied Physics. ,vol. 112, pp. 054325- ,(2012) , 10.1063/1.4749797
Y. Yao, S. Fan, Si nanowires synthesized with Cu catalyst Materials Letters. ,vol. 61, pp. 177- 181 ,(2007) , 10.1016/J.MATLET.2006.04.045
R. P. Sugavaneshwar, Karuna Kar Nanda, Uninterrupted and reusable source for the controlled growth of nanowires Scientific Reports. ,vol. 3, pp. 1172- 1172 ,(2013) , 10.1038/SREP01172
Hugh Geaney, Calum Dickinson, Christopher A. Barrett, Kevin M. Ryan, High Density Germanium Nanowire Growth Directly from Copper Foil by Self-Induced Solid Seeding Chemistry of Materials. ,vol. 23, pp. 4838- 4843 ,(2011) , 10.1021/CM202276M
Yanwu Zhu, Yousheng Zhang, Ling Dai, Fook-Chiong Cheong, Vincent Tan, Chorng-Haur Sow, Chwee-Teck Lim, Mechanical characterization of hotplate synthesized vanadium oxide nanobelts Acta Materialia. ,vol. 58, pp. 415- 420 ,(2010) , 10.1016/J.ACTAMAT.2009.09.018