Growth and transport properties of complementary germanium nanowire field-effect transistors

作者: Andrew B. Greytak , Lincoln J. Lauhon , Mark S. Gudiksen , Charles M. Lieber

DOI: 10.1063/1.1755846

关键词: NanotechnologyDopingChemical vapor depositionDopantVapor–liquid–solid methodOptoelectronicsNanowireMaterials scienceGermaniumEpitaxyField-effect transistor

摘要: … type Ge nanowires and the fabrication of Ge nanowire p- and n-FETs. Previously, Ge nanowires … phase Ge is provided by laser ablation,8 physical vapor transport,9,10 or by a molecular …

参考文章(18)
B. Tillack, B. Heinemann, D. Knoll, Atomic layer doping of SiGe – fundamentals and device applications Thin Solid Films. ,vol. 369, pp. 189- 194 ,(2000) , 10.1016/S0040-6090(00)00804-X
B. E. Weir, L. C. Feldman, D. Monroe, H.‐J. Grossmann, R. L. Headrick, T. R. Hart, Electrical characterization of an ultrahigh concentration boron delta‐doping layer Applied Physics Letters. ,vol. 65, pp. 737- 739 ,(1994) , 10.1063/1.112215
Alfredo M. Morales, Charles M. Lieber, A Laser Ablation Method for the Synthesis of Crystalline Semiconductor Nanowires Science. ,vol. 279, pp. 208- 211 ,(1998) , 10.1126/SCIENCE.279.5348.208
Yi Cui, Zhaohui Zhong, Deli Wang, Wayne U. Wang, Charles M. Lieber, High Performance Silicon Nanowire Field Effect Transistors Nano Letters. ,vol. 3, pp. 149- 152 ,(2003) , 10.1021/NL025875L
H. Shang, H. Okorn-Schimdt, J. Ott, P. Kozlowski, S. Steen, E.C. Jones, H.-S.P. Wong, W. Hanesch, Electrical characterization of germanium p-channel MOSFETs IEEE Electron Device Letters. ,vol. 24, pp. 242- 244 ,(2003) , 10.1109/LED.2003.810879
Yu Huang, Xiangfeng Duan, Yi Cui, Charles M. Lieber, Gallium Nitride Nanowire Nanodevices Nano Letters. ,vol. 2, pp. 101- 104 ,(2002) , 10.1021/NL015667D
Ali Javey, Qian Wang, Ant Ural, Yiming Li, Hongjie Dai, Carbon Nanotube Transistor Arrays for Multistage Complementary Logic and Ring Oscillators Nano Letters. ,vol. 2, pp. 929- 932 ,(2002) , 10.1021/NL025647R
Charles M. Lieber, Nanoscale Science and Technology: Building a Big Future from Small Things Mrs Bulletin. ,vol. 28, pp. 486- 491 ,(2003) , 10.1557/MRS2003.144
Zhaohui Zhong, Fang Qian, Deli Wang, Charles M. Lieber, Synthesis of p-Type Gallium Nitride Nanowires for Electronic and Photonic Nanodevices Nano Letters. ,vol. 3, pp. 343- 346 ,(2003) , 10.1021/NL034003W