Growth of boron nitride thin films by metal-organic chemical vapour deposition
作者： A. Ratna Phani , Sujit Roy , V.J. Rao
DOI: 10.1016/0040-6090(94)06335-4
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摘要: Boron nitride films were grown for the first time by metal-organic chemical vapour deposition from trimethyl borazine as a single-source organometallic precursor containing boron and …
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W. A. Yarbrough, R. Messier, Current Issues and Problems in the Chemical Vapor Deposition of Diamond Science. ,vol. 247, pp. 688- 696 ,(1990) , 10.1126/SCIENCE.247.4943.688
A. Ratna Phani, Thin films of boron nitride grown by CVD Bulletin of Materials Science. ,vol. 17, pp. 219- 224 ,(1994) , 10.1007/BF02745173
S. Shanfield, R. Wolfson, Ion beam synthesis of cubic boron nitride Journal of Vacuum Science and Technology. ,vol. 1, pp. 323- 325 ,(1983) , 10.1116/1.572124
M. D. Wiggins, C. R. Aita, F. S. Hickernell, Radio frequency sputter deposited boron nitride films Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. ,vol. 2, pp. 322- 325 ,(1984) , 10.1116/1.572592
S Komatsu, Y Moriyoshi, M Kasamatsu, K Yamada, Cubic boron nitride crystallites grown by laser-enhanced plasma chemical vapour deposition Journal of Physics D: Applied Physics. ,vol. 24, pp. 1687- 1690 ,(1991) , 10.1088/0022-3727/24/9/024
G.Sarala Devi, Sujit Roy, V.J. Rao, Boron nitride thin films on Si(100) by metal organic chemical vapour deposition Solid State Communications. ,vol. 87, pp. 67- 70 ,(1993) , 10.1016/0038-1098(93)90538-X
Masatoshi Sano, Masaharu Aoki, Chemical vapour deposition of thin films of BN onto fused silica and sapphire Thin Solid Films. ,vol. 83, pp. 247- 251 ,(1981) , 10.1016/0040-6090(81)90674-X
S Manorama, G N Chaudhari, V J Rao, Growth of BN by hot filament assisted electron beam deposition Journal of Physics D. ,vol. 26, pp. 1793- 1795 ,(1993) , 10.1088/0022-3727/26/10/038
H. I. Schlesinger, Leo Horvitz, A. B. Burg, Hydrides of Boron. VI. The Action of Ammonia on the Methyl Diboranes Journal of the American Chemical Society. ,vol. 58, pp. 409- 414 ,(1936) , 10.1021/JA01294A008
H. Saitoh, T. Hirose, Y. Hirotsu, Y. Ichinose, Synthesis of BN films by the plasma CVD with various solids: BH3NH3, H3BO3 and NaBH4 Surface and Coatings Technology. ,vol. 39-40, pp. 265- 273 ,(1989) , 10.1016/0257-8972(89)90060-1