Fabrication and direct transmission measurement of high-aspect-ratio two-dimensional silicon-based photonic crystal chips

作者: Ying Xu , Hong-Bo Sun , Jia-Yu Ye , Shigeki Matsuo , Hiroaki Misawa

DOI: 10.1364/JOSAB.18.001084

关键词:

摘要: … [14] A combination of the silicon-based structures mentioned … Silicon-based PhC structures have been realized by using … the PhC chips by using standard semiconductor processing …

参考文章(25)
Akihiko Shinya, Masaya Notomi, Itaru Yokohama, Chiharu Takahashi, Jun‐Ichi Takahashi, Toshiaki Tamamura, Two-dimensional Si photonic crystals on oxide using SOI substrate Optical and Quantum Electronics. ,vol. 34, pp. 113- 121 ,(2002) , 10.1023/A:1013396524703
Axel Scherer, Eli Yablonovitch, Chuan C. Cheng, Yeshayahu Fainman, George Witzgall, Rong-Chung Tyan, New Fabrication Techniques for High-Quality Photonic Crystals Journal of Vacuum Science and Technology. ,vol. 15, pp. 2764- 2767 ,(1997)
Kamilʹ Akhmetovich Valiev, The physics of submicron lithography ,(1992)
J.R. Kiniry, Wavelength division multiplexing: ultra high speed fiber optics IEEE Internet Computing. ,vol. 2, pp. 13- 15 ,(1998) , 10.1109/4236.670678
U. Grüning, V. Lehmann, C. M. Engelhardt, Two‐dimensional infrared photonic band gap structure based on porous silicon Applied Physics Letters. ,vol. 66, pp. 3254- 3256 ,(1995) , 10.1063/1.113395
C. C. Cheng, Fabrication of photonic band-gap crystals Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 13, pp. 2696- 2700 ,(1995) , 10.1116/1.588051
Hideo Kosaka, Takayuki Kawashima, Akihisa Tomita, Masaya Notomi, Toshiaki Tamamura, Takashi Sato, Shojiro Kawakami, Superprism Phenomena in Photonic Crystals Physical Review B. ,vol. 58, ,(1998) , 10.1103/PHYSREVB.58.R10096
Masatoshi Tokushima, Hideo Kosaka, Akihisa Tomita, Hirohito Yamada, Lightwave propagation through a 120° sharply bent single-line-defect photonic crystal waveguide Applied Physics Letters. ,vol. 76, pp. 952- 954 ,(2000) , 10.1063/1.125902
Sajeev John, Strong localization of photons in certain disordered dielectric superlattices Physical Review Letters. ,vol. 58, pp. 2486- 2489 ,(1987) , 10.1103/PHYSREVLETT.58.2486
M. Plihal, A. A. Maradudin, Photonic band structure of two-dimensional systems: The triangular lattice Physical Review B. ,vol. 44, pp. 8565- 8571 ,(1991) , 10.1103/PHYSREVB.44.8565