Combined influence of titania and silica precursors on the properties of thin film humidity sensing elements prepared via a sol–gel method
作者： Zvezditza Nenova , Stephan Kozhukharov , Toshko Nenov , Nedyu Nedev , Maria Machkova
DOI: 10.1016/J.SNB.2015.10.010
关键词:
摘要: Abstract The present work deals with the comparative investigations of combined influence precursors TiO 2 and SiO : Tetrabutyl orthotitanate, Tetraethoxysilane (3-Glycidyloxypropyl)trimethoxysilane in presence Ce-ions on properties respective thin film humidity sensing elements prepared via a sol–gel method sintered at 400 °C. SEM, EDX XRD analyses obtained samples have been carried out to study their surface morphology structural composition. electrical characteristics parameters investigated by means an impedance analyzer. It has established that type proportions substantially affect structure films properties. combination both types all cases results enhancement sensor elements’ response compared use only one these precursors. change resistance reaches about four orders magnitude within range from 15 93% relative frequency 20 Hz 25 °C.
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sci-hub.se 参考文章(62)
Sol–gel processed iron oxide–silica nanocomposite films as room-temperature humidity sensors Sensors and Actuators B-chemical. ,vol. 106, pp. 523- 528 ,(2005) , 10.1016/J.SNB.2004.07.019
M. D'Apuzzo, A. Aronne, S. Esposito, P. Pernice, Sol-Gel Synthesis of Humidity-Sensitive P2O5-SiO2 Amorphous Films Journal of Sol-Gel Science and Technology. ,vol. 17, pp. 247- 254 ,(2000) , 10.1023/A:1008720223563
G. Sberveglieri, Gas sensors : principles, operation and developments Kulwer Academic Publishers. ,(1992)
Toshko G. Nenov, Stefcho P. Yordanov, Ceramic Sensors: Technology and Applications ,(1996)
Massimo Guglielmi, Guido Kickelbick, Alessandro Martucci, Sol-gel nanocomposites Springer. pp. 3041- 3063 ,(2014) , 10.1007/978-3-319-32101-1_100
Jacob Fraden, Handbook of modern sensors ,(1997)
Ganesh Kumar Mani, John Bosco Balaguru Rayappan, A highly selective and wide range ammonia sensor—Nanostructured ZnO:Co thin film Materials Science and Engineering B-advanced Functional Solid-state Materials. ,vol. 191, pp. 41- 50 ,(2015) , 10.1016/J.MSEB.2014.10.007
Chil-Won Lee, Hyung-Seok Park, Jong-Gyu Kim, Myoung-Seon Gong, None, Humidity sensitivity of hybrid polyelectrolytes prepared by the sol-gel process Macromolecular Research. ,vol. 13, pp. 96- 101 ,(2005) , 10.1007/BF03219021
Jinchun Tu, Nan Li, Wangchang Geng, Rui Wang, Xiaoyong Lai, Yang Cao, Tong Zhang, Xiaotian Li, Shilun Qiu, Study on a type of mesoporous silica humidity sensing material Sensors and Actuators B-chemical. ,vol. 166, pp. 658- 664 ,(2012) , 10.1016/J.SNB.2012.03.033
Q Wang, Y Z Pan, S S Huang, S T Ren, P Li, J J Li, Resistive and capacitive response of nitrogen-doped TiO2 nanotubes film humidity sensor Nanotechnology. ,vol. 22, pp. 025501- 025501 ,(2011) , 10.1088/0957-4484/22/2/025501