A silicon probe with integrated microheaters for thermal marking and monitoring of neural tissue
作者： Jingkuang Chen , K.D. Wise
DOI: 10.1109/10.605437
关键词:
摘要: This paper describes a microheater structure and its integration on silicon microprobe. The 30-/spl mu/m-diameter microstructure can be used to heat local areas of tissue or measure temperature with an accuracy <0.3/spl deg/C. polysilicon is suspended dielectric membrane reduce undesired conduction the probe substrate. heating efficiency 4.4/spl deg/C/mW in still water 2.2/spl guinea pig cortex. Six milliwatts applied for 2 min cortex produces 50/spl deg/C, creating well-defined 50-/spl mu/m-wide lesion determining position histologically. Fabrication heaters requires no additional masking processing steps addition those normally recording stimulating probes.
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