作者: Hiroyuki Matsushiro , Tetsuji Onuki , Masatoshi Suzuki
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摘要: A compound type microscope is provided which can observe the measurement sample of an atomic force (AFM) by means optical microscope. This comprised having objective and observation system, a cantilever reflecting surface detecting force, irradiating system for applying spotlight to cantilver, detector displacement reflected light caused cantilever, stage placing thereon. The arrangement be designed accommodate use scanning tunnel (STM) interchangeably with AFM so that measured STM instead AFM. To this end, probe detachably mountable coaxially respect microscope, whereby selectively disposed below objective.