Shower head structure and treating device

摘要: A shower head structure characterized by comprising a section, opposed to the upper surface of mounting table in an evacuable treating vessel, for injecting processing gas into vessel; temperature observation through-hole which opens lower so as be table, transparent window hermetically seals end through-hole, radiation thermometer disposed on window, adhesion preventive supply path communicating with prevent film from adhering wherein communicates through injection nozzle window.