Thickness-dependent tunable characteristics of (Ba0.5Sr0.5)0.925K0.075TiO3 thin films prepared by pulsed laser deposition
作者： Koppole C. Sekhar , Sung Hun Key , Kyung Pyo Hong , Chan Su Han , Jong Min Yook
DOI: 10.1016/J.CAP.2011.09.017
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摘要: Abstract The thickness-dependent dielectric properties and tunability of pulsed laser deposited (Ba 0.5 Sr ) 0.925 K 0.075 TiO 3 (BSKT) thin films with different thickness ranging from 80 to 300 nm has been investigated. Dielectric the BSKT are substantially improved as film increases, which can be explained by model a low-permittivity dead layer that is connected in series bulk region film. estimated values average constant for 2.4 nm 23.5, respectively, Pt/BSKT/Pt capacitor structure. figure merit increased increasing thickness, attributed change lattice parameter effect.
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