作者: Y. Inoue , K. Katoh , M. Kawachi
DOI: 10.1109/68.124868
关键词:
摘要: A thermooptic (TO) phase shifter, which consists of a thin-film heater loaded on silica-based single-mode waveguide Si substrate, was found to exhibit sli1h,t polarization dependence about 3.1% between the TE and TM modes. This dependence, is caused by anisotropic stress concentration due local heating, successfully reduced forming stress-releasing grooves either side heater. >