Infrared micro-spectrometer based on a diffraction grating
作者： S.H. Kong , D.D.L. Wijngaards , R.F. Wolffenbuttel
DOI: 10.1016/S0924-4247(01)00544-1
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摘要: … cavities and gratings have been … -slit diffraction grating based IR micro-spectrometer that, it is rather simple to fabricate and remains compatible with standard IC processing. A grating is …
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