Process for manufacturing a ferroelectric device and devices manufactured thereby

作者: George A. Rohrer

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摘要: A process for manufacturing a ferroelectric device includes the steps of chemically cleaning substrate, followed by radio frequency etching substrate. The substrate is then pre-heated. first electrical contact formed on and over portion there vapor deposited stable thin film potassium nitrate. Then second at least part covering silicon monoxide vacuum assemblage contacts annealed approximately twenty-four hours temperature 160° C.

参考文章(5)
James P Nolta, Norman W Schubring, Ferroelectric material and method of making it ,(1963)
Robert T Galla, Harold M Greenhouse, Method of preparing resistive films ,(1968)
Max J Schuller, Michael J Urban, Erwin F Littau, Resistor and contact means on a base ,(1966)