Quantitative AES and XPS: Determination of the electron spectrometer transmission function and the detector sensitivity energy dependencies for the production of true electron emission spectra in AES and XPS

摘要: For the use of published general or theoretical sensitivity factors in quantitative AES and XPS, energy dependence both spectrometer transmission function detector must be known. Here, we develop simple procedures that allow these dependencies to determined experimentally. Detailed measurements for a modified VG Scientific ESCALAB II, metrology spectrometer, operated constant ΔE/E ΔE modes, are presented compared with estimates. It is shown an exceptionally detailed electron-optical calculation, involving proprietary information, would required match accuracy experimental developed. Removal terms measured spectrum converted true electron emission spectrum, irrespective mode operation. This provides first step provision reference samples calibrate functions sensitivities all instruments so they, turn, may produce spectra. vital if: (1) give consistent results; (2) used quantifying either XPS; (3) data banks established XPS.