Multi-hollow surface dielectric barrier discharge for plasma treatment of patterned silicon surfaces

摘要: Abstract A novel multi-hollow surface dielectric barrier discharge (MSDBD) plasma source was used to generate atmospheric-pressure in air. MSDBD generates inside 105 holes within two parallel electrodes fully embedded robust alumina ceramics. The inner area of also covered by the ceramics and generated not contact with high-voltage electrodes, which enables long-term stability electrode system therefore practically “unlimited” lifetime. employed for modification silicon surfaces at various distances ranging from 0.00 mm 1.07 mm. major advantage higher substrates surface. For instance, coplanar DBD effective 0.1 mm 0.3 mm. range experimental techniques study efficiency treatment on including energy measurement, X-ray photoelectron spectroscopy Atomic force microscopy. It found that can be effectively modified plasma, even a distance 1 mm, allowing patterned fields, e.g. microfluidics.