Formation of nanodots on GaAs by 50keV Ar+ ion irradiation
作者： Tanuj Kumar , SA Khan , UB Singh , S Verma , D Kanjilal
DOI: 10.1016/J.APSUSC.2011.07.005
关键词:
摘要: Nanopatterning of semi-insulating GaAs (100) by 50keV Ar+ ion irradiation at an angle of 50° with respect to surface normal is investigated systematically. The samples were …
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