Synthesis of embedded Au nanostructures by ion irradiation: influence of ion induced viscous flow and sputtering

作者: Udai B Singh , DC Agarwal , SA Khan , S Mohapatra , H Amekura

DOI: 10.3762/BJNANO.5.10

关键词: NanoparticleSputteringTransmission electron microscopyNanotechnologyMaterials scienceIonAnalytical chemistrySubstrate (electronics)Context (language use)FluenceRutherford backscattering spectrometry

摘要: The ion-irradiation induced synthesis of embedded Au nanoparticles (NPs) into glass from islands on a substrate is studied in the context recoiling atoms, sputtering and viscous flow. Cross sectional transmission electron microscopy studies revealed formation NPs substrates by 50 keV Si(-) ion irradiation irregularly shaped nanostructures surfaces at fluence 3 × 10(16) ions/cm(2). depth profiles samples were obtained high-resolution Rutherford backscattering spectrometry studies. results TRIDYN simulation reveal role various ion-induced processes during NPs, viz. atoms. Simulation experimental suggest that flow one major factors are responsible for embedding substrate.

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