摘要: This paper reviews nanofabrication techniques using focused ion beams(FIB). Nanofabrication is important for exploratory study of physics in mesoscopic systems and future applications. Ion beam play an role nanofabrication, various new fabrication have been developed. Among them, FIB are promising steps including lithography, doping, pattern transfer situ fabrication. Nanopattern delineation nanodevice already demonstrated FIB.
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