Dielectric layer including silicalite crystals and binder and method for producing same for microelectronic circuits

作者: Justin F. Gaynor

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摘要: A two-component porous material including small silicalite crystals in a binder provides low dielectric constant useful as an insulating layer microelectronic devices. The silicalite/binder uses nanocrystals smaller than the characteristic dimensions of features on integrated circuit device. is amorphous that links together, formed from precursor which polymerizes heating. are supplied colloidal suspension or slurry. slurry and spincoated onto substrate thermally treated to polymerize drive off solvent slurry, forming material. readily into standard damascene fabrication processes.

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