Failure predictive model of capacitive RF-MEMS
作者： S. Mellé , D. De Conto , L. Mazenq , D. Dubuc , B. Poussard
DOI: 10.1016/J.MICROREL.2005.07.092
关键词:
摘要: … We only consider the stiction failure mode as we have seen that, with appropriate applied voltage, this mode … We finally proposed a figure of Merit of capacitive RF-MEMS lifetime, which …
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sci-hub.se 参考文章(7)
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