Effect of space charge polarization in radio frequency microelectromechanical system capacitive switch dielectric charging
作者： G. J. Papaioannou , M. Exarchos , V. Theonas , J. Psychias , G. Konstantinidis
DOI: 10.1063/1.2347278
关键词:
摘要: The letter presents the investigation of temperature dependence charging mechanism dielectric layer in radio frequency microelectromechanical system switch. accumulated charge kinetics are monitored through transient response device capacitance when a bias greater than pull-in is applied. shown to follow stretched exponential law. “time scale” process found be thermally activated, with an activation energy that determined from Arrhenius plot.
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sci-hub.se 参考文章(23)
J. Vanderschueren, J. Gasiot, Field-induced thermally stimulated currents Springer, Berlin, Heidelberg. pp. 135- 223 ,(1979) , 10.1007/3540095950_10
Gabriel M. Rebeiz, RF MEMS: Theory, Design, and Technology ,(2003)
Thermally stimulated relaxation in solids Thermally Stimulated Relaxation in Solids. ,vol. 37, ,(1979) , 10.1007/3-540-09595-0
T. Lisec, C. Huth, B. Wagner, Dielectric material impact on capacitive RF MEMS reliability european microwave conference. ,vol. 1, pp. 73- 76 ,(2004)
Jürgen Wibbeler, Günter Pfeifer, Michael Hietschold, Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS) Sensors and Actuators A-physical. ,vol. 71, pp. 74- 80 ,(1998) , 10.1016/S0924-4247(98)00155-1
R. A. Baragiola, M. Shi, R. A. Vidal, C. A. Dukes, Fast proton-induced electron emission from rare-gas solids and electrostatic charging effects Physical Review B. ,vol. 58, pp. 13212- 13218 ,(1998) , 10.1103/PHYSREVB.58.13212
Jacques Cazaux, Correlation between the x-ray induced and the electron-induced electron emission yields of insulators Journal of Applied Physics. ,vol. 89, pp. 8265- 8272 ,(2001) , 10.1063/1.1368867
R. Ramprasad, Phenomenological theory to model leakage currents in metal–insulator–metal capacitor systems Physica Status Solidi B-basic Solid State Physics. ,vol. 239, pp. 59- 70 ,(2003) , 10.1002/PSSB.200303239
M. Exarchos, V. Theonas, P. Pons, G.J. Papaioannou, S. Melle, D. Dubuc, F. Cocetti, R. Plana, Investigation of charging mechanisms in Metal-Insulator-Metal structures Microelectronics Reliability. ,vol. 45, pp. 1782- 1785 ,(2005) , 10.1016/J.MICROREL.2005.07.094
V G Theonas, M Exarchos, G Konstantinidis, G J Papaioannou, RF MEMS sensitivity to electromagnetic radiation Journal of Physics: Conference Series. ,vol. 10, pp. 313- 316 ,(2005) , 10.1088/1742-6596/10/1/077