Dielectric Discharging processes in RF-MEMS Capacitive Switches
作者： George Papaioannou , Eleni Papandreou , John Papapolymerou , Richard Daigler
DOI: 10.1109/APMC.2007.4554527
关键词:
摘要: The discharging processes in silicon nitride dielectric film of RF-MEMS capacitive switches are investigated for the first time. study includes dependence as a function temperature that allows detection thermally activated mechanisms. time constants were found to depend only on and not actuation bias polarity.
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