A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches
作者： W Merlijn van Spengen , Robert Puers , Robert Mertens , Ingrid De Wolf
DOI: 10.1088/0960-1317/14/4/011
关键词:
摘要: … failure mode is parasitic charging of the dielectric of such devices. In this paper we present … of insulator charging on the behavior of capacitive RF MEMS switches, and to describe the …
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