A methodology and model for the pull-in parameters of electrostatic actuators

摘要: This paper presents a generalized model for the pull-in phenomenon in electrostatic actuators with single input, either charge or voltage. The of general actuator input is represented by an algebraic equation referred to as equation. directly yields parameters, namely, voltage and displacement. presented here permits analysis wide range cases, including nonlinear mechanical effects well various nonlinear, nonideal, parasitic electrical effects. In some analytic solution derived, which provides physical insight into how parameters depend upon design properties actuator. can also yield rapid numerical solutions, allowing interactive optimal design. then utilized analyze analytically case Duffing spring, previously analyzed numerically Hung Senturia, captures variations continuum between perfectly linear spring cubic spring. Several other studies are described using equation, parallel-plate tilted-plate (torsion) taking account fringing field capacitance, feedback trapped charges, external force, large displacements.