Systems and methods for sample inspection and review
作者： Yakov Bobrov , Isabella T. Lewis
DOI:
关键词:
摘要: The disclosure is directed to systems and methods for sample inspection review. In some embodiments, images are collected and/or defects located utilizing separately addressable red, green, blue (RGB) illumination sources improve image quality. pulse width modulated substantially consistent light intensity in presence of variable motion. a stage assembly configured support the without blocking access supported surface sample, further reduce oscillations or vibrations sample. an system includes imaging path focusing allow full field view focusing.
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