Modifizierung von SiO2‐Oberflächen mit Hilfe von Plasmen Teil I — EPR‐spektroskopische Untersuchung der Defektzentren und der Einfluß des Plasmaträgergases auf deren Bildung

作者: Klaus Meyer , Hans-Jürgen Tiller , Elisabeth Welz , Wolfgang Kühn

DOI: 10.1002/ZFCH.19740140405

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