Preparation of PbTiO3 thin films using an alkoxide-alkanolamine sol-gel system
作者： Seung Hyun Kim , Chang Eun Kim , Young Jei Oh
DOI: 10.1007/BF00356697
关键词:
摘要: The stable range of PbTiO3 sol and the processing conditions uniform thin films were investigated using a solution titanium isopropoxide, three kinds alkanolamines (monoethanolamine, diethanolamine, triethanolamine), lead acetate trihydrate isopropanol. Depending on state with various alkanolamine/alkoxide molar ratios, diethanolamine (DEA) was very effective in preparing dense oxide through room-temperature reaction, owing to its superior stability during hydrolysis condensation reaction. Perovskite obtained oxidized silicon wafer above 550 °C completely pure at 650 DEA as complexing agent. dielectric constant loss tangent these fired for 30 min found be ∼240 ∼0.01 1 kHz, respectively.
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