On the subthreshold drain current sweep hysteresis of 4H-SiC nMOSFETs

作者: Gerald Rescher , Gregor Pobegen , Thomas Aichinger , Tibor Grasser

DOI: 10.1109/IEDM.2016.7838392

关键词:

摘要: We study the subthreshold drain current hysteresis of 4H silicon carbide Si-face (0001) and a-face (1120) n-channel power MOSFETs between gate voltage sweeps from accumulation to inversion vice versa. Depending on direction sweep, show a different at same voltage. The observed up-sweep down-sweep can be expressed as shift may reach several volts. that is caused by hole capture in border traps during directly propotional charge pumping signal. fully recoverable applying bias above threshold does not impact device reliability.

参考文章(5)
Charles Scozzie, J.M. McGarrity, Charge Pumping Measurements on SiC MOSFETs Materials Science Forum. pp. 985- 988 ,(1998) , 10.4028/WWW.SCIENTIFIC.NET/MSF.264-268.985
F. Barry McLean, Siddharth Potbhare, Daniel B. Habersat, Aivars J. Lelis, J.M. McGarrity, The Effect of Nitridation on SiC MOS Oxides as Evaluated by Charge Pumping Materials Science Forum. pp. 743- 746 ,(2008) , 10.4028/WWW.SCIENTIFIC.NET/MSF.600-603.743
Liang Chun Yu, Jody Fronheiser, Vinayak Tilak, Kin P. Cheung, Frequency-Dependent Charge Pumping on 4H-SiC MOSFETs Materials Science Forum. pp. 793- 796 ,(2012) , 10.4028/WWW.SCIENTIFIC.NET/MSF.717-720.793
Lori A. Lipkin, Mrinal K. Das, John W. Palmour, N2O Processing Improves the 4H-SiC:SiO2 Interface Materials Science Forum. pp. 985- 988 ,(2002) , 10.4028/WWW.SCIENTIFIC.NET/MSF.389-393.985
Dai Okamoto, Hiroshi Yano, Tomoaki Hatayama, Yukiharu Uraoka, Takashi Fuyuki, Analysis of Anomalous Charge-Pumping Characteristics on 4H-SiC MOSFETs IEEE Transactions on Electron Devices. ,vol. 55, pp. 2013- 2020 ,(2008) , 10.1109/TED.2008.926639