Multi-threshold voltage semiconductor device
作者： Tsai Mu-Kai , Lee Kung-Hong , Lin Chung-Hsing
DOI:
关键词:
摘要: A semiconductor device preferably includes: a first metal-oxide (MOS) transistor on substrate; ferroelectric (FE) layer connected to the MOS transistor; second and FE transistor. Preferably, include different capacitance.
lens.org 参考文章(26)
Katsuaki Asano, Shun Mitarai, Akihiko Ochiai, Yasuyuki Ito, Oxygen diffusion blocking semiconductor capacitor ,(2000)
Keizo Sakiyama, Jun Kudo, Yasuyuki Itoh, Shigeo Onishi, Semiconductor memory device with amorphous diffusion barrier between capacitor and plug ,(1997)
Kumi Okuwada, Tomio Katata, Hiroshi Mochizuki, Hiroyuki Kanaya, Sumito Ootsuki, Osamu Hidaka, Norihisa Arai, Hiroyuki Takenaka, Semiconductor device and method for the manufacture thereof ,(2003)
Thomas N. Theis, Vijay Narayanan, David J. Frank, Martin M. Frank, Catherine A. Dubourdieu, Paul M. Solomon, Ferroelectric semiconductor transistor devices having gate modulated conductive layer ,(2011)
Katherine L. Saenger, Devendra K. Sadana, Stephen W. Bedell, Norma E. Sosa Cortes, Ghavam Shahidi, Davood Shahrjerdi, Steven J. Koester, Wilfried E. Haensch, Autonomous integrated circuits ,(2014)
Chun Wing Yeung, Asif I. Khan, Sayeef Salahuddin, Chenming Hu, Device design considerations for ultra-thin body non-hysteretic negative capacitance FETs 2013 Third Berkeley Symposium on Energy Efficient Electronic Systems (E3S). pp. 1- 2 ,(2013) , 10.1109/E3S.2013.6705876
Hiroshi Ishiwara, Memory structure in ferroelectric nonvolatile memory and readout method therefor ,(1999)
Asif Islam Khan, Korok Chatterjee, Juan Pablo Duarte, Zhongyuan Lu, Angada Sachid, Sourabh Khandelwal, Ramamoorthy Ramesh, Chenming Hu, Sayeef Salahuddin, None, Negative Capacitance in Short-Channel FinFETs Externally Connected to an Epitaxial Ferroelectric Capacitor IEEE Electron Device Letters. ,vol. 37, pp. 111- 114 ,(2016) , 10.1109/LED.2015.2501319
Kazuaki Kurihara, Masaki Kurasawa, Kenji Maruyama, Capacitor and method for fabricating the same, and semiconductor device and method for fabricating the same ,(2001)
Volker Weinrich, Günther Schindler, Igor Kasko, Walter Hartner, Method of manufacturing a ferroelectric capacitor configuration ,(2001)