Method of manufacturing a ferroelectric capacitor configuration
作者： Volker Weinrich , Günther Schindler , Igor Kasko , Walter Hartner
DOI:
关键词: Layer (electronics) 、 Spin coating 、 Ferroelectric capacitor 、 Voltage 、 Optoelectronics 、 Materials science 、 Electrode 、 Electrical engineering 、 Varying thickness 、 Ferroelectricity
摘要: A ferroelectric capacitor configuration is configured with at least two different coercitive voltages. first electrode structure having a surface which forms levels firstly produced. layer of material varying thickness deposited over the by spin coating. second subsequently formed on material.
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