The influence of thermal annealing on the structural, optical and electrical properties of AZO thin films deposited by magnetron sputtering
作者： Daniel Meljanac , Krunoslav Juraić , Vilko Mandić , Hrvoje Skenderović , Sigrid Bernstorff
DOI: 10.1016/J.SURFCOAT.2017.04.072
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摘要: Abstract Thin Al-doped ZnO (AZO) films were deposited by magnetron sputtering on a non-heated quartz substrate. As-deposited samples have nanocrystalline structure, high transparency in the visible part of spectrum, but relatively low conductivity. After deposition, isochronally annealed for one hour hydrogen atmosphere at 200, 300 or 400 °C. The influence such treatment structural properties was analysed GIXRD and correlated with UV–Vis, photoluminescence impedance measurements. investigation demonstrated that heat reduces strain material, volume crystal lattice decreases size grows. By measuring optical it shown heating increases gap gradually number point defects, mostly related to interstitial atoms. As result this process, conductivity room temperature increased > 9 orders magnitude due an enhancement mobility concentration free carriers. activation energy defect annihilation estimated be about 1 eV corresponds diffusion atoms vacancies. carriers dopants act as shallow donors.
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sci-hub.se 参考文章(43)
Matthew D. McCluskey, Chapter Eight – Point Defects in ZnO Semiconductors and Semimetals. ,vol. 91, pp. 279- 313 ,(2015) , 10.1016/BS.SEMSEM.2014.11.002
Joshy Jose, M Abdul Khadar, Role of grain boundaries on the electrical conductivity of nanophase zinc oxide Materials Science and Engineering A-structural Materials Properties Microstructure and Processing. ,vol. 304, pp. 810- 813 ,(2001) , 10.1016/S0921-5093(00)01579-3
Dongxu Zhao, Caroline Andreazza, Pascal Andreazza, Jiangang Ma, Yichun Liu, Dezhen Shen, Temperature-dependent growth mode and photoluminescence properties of ZnO nanostructures Chemical Physics Letters. ,vol. 399, pp. 522- 526 ,(2004) , 10.1016/J.CPLETT.2004.10.066
Su-Shia Lin, Jow-Lay Huang, P Šajgalik, The properties of heavily Al-doped ZnO films before and after annealing in the different atmosphere Surface & Coatings Technology. ,vol. 185, pp. 254- 263 ,(2004) , 10.1016/J.SURFCOAT.2003.12.007
Jordi Sancho-Parramon, Davor Gracin, Mircea Modreanu, Andreja Gajović, Optical spectroscopy study of nc-Si based p-i-n solar cells Solar Energy Materials and Solar Cells. ,vol. 93, pp. 1768- 1772 ,(2009) , 10.1016/J.SOLMAT.2009.06.008
Wai Ming Kwok, AB Djurišić, YH Leung, WK Chan, DL Phillips, None, Time-resolved photoluminescence study of the stimulated emission in ZnO nanoneedles Applied Physics Letters. ,vol. 87, pp. 093108- ,(2005) , 10.1063/1.2035871
Krunoslav Juraić, Davor Gracin, Igor Djerdj, Andrea Lausi, Miran Čeh, Davor Balzar, Structural analysis of amorphous-nanocrystalline silicon thin films by grazing incidence X-ray diffraction Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 284, pp. 78- 82 ,(2012) , 10.1016/J.NIMB.2011.07.018
A. Moguš-Milanković, A. Šantić, S.T. Reis, K. Furić, D.E. Day, Studies of lead–iron phosphate glasses by Raman, Mössbauer and impedance spectroscopy Journal of Non-Crystalline Solids. ,vol. 351, pp. 3246- 3258 ,(2005) , 10.1016/J.JNONCRYSOL.2005.08.006
Min-Chang Jeong, Byeong-Yun Oh, Moon-Ho Ham, Jae-Min Myoung, Electroluminescence from ZnO nanowires in n-ZnO film/ZnO nanowire array/p-GaN film heterojunction light-emitting diodes Applied Physics Letters. ,vol. 88, pp. 202105- ,(2006) , 10.1063/1.2204655
Benjamin Weintraub, Zhengzhi Zhou, Yinhua Li, Yulin Deng, Solution synthesis of one-dimensional ZnO nanomaterials and their applications Nanoscale. ,vol. 2, pp. 1573- 1587 ,(2010) , 10.1039/C0NR00047G