作者: Tao Fu , Kunkun Cui , Jie Wang , Yingyi Zhang , Fuqiang Shen
DOI: 10.1016/J.VACUUM.2021.110297
关键词:
摘要: … Among them, tungsten disilicide (WSi 2 ) is considered to be … , the tungsten disilicide coatings are deposited on the tungsten … , roughness and texture of tungsten disilicide coatings are …