High piezoelectricity of Pb(Zr,Ti)O3-based ternary compound thin films on silicon substrates
作者： Tao Zhang , Kiyotaka Wasa , Shu-yi Zhang , Zhao-jiang Chen , Feng-mei Zhou
DOI: 10.1063/1.3103553
关键词:
摘要: Pb(Zr,Ti)O3 (PZT)-based ternary compound thin films, 0.06PMnN-0.94PZT(50/50) (PMnN-PZT), are deposited on Si-based heterostructures by rf magnetron sputtering system. The intrinsic PZT(50/50) films also the same kind of substrates for comparison. PMnN-PZT show similar polycrystalline structures as those PZT with highly (111) oriented perovskite phase. excellent piezoelectricity and ferroelectricity which distinctly better than prepared deposition conditions. Besides, cantilevers heterostructure exhibit higher sensitivities film cantilevers.
scitation.org
harvard.edu
aip.org
sci-hub.se 参考文章(10)
L Eric Cross, None, Ferroelectric Ceramics: Tailoring Properties for Specific Applications Birkhäuser Basel. pp. 1- 85 ,(1993) , 10.1007/978-3-0348-7551-6_1
Ghi Yuun Kang, Sang-Woo Bae, Hyung-Ho Park, Tae Song Kim, Fabrication and electromechanical properties of a self-actuating Pb(Zr0.52Ti0.48)O3 microcantilever using a direct patternable sol-gel method Applied Physics Letters. ,vol. 88, pp. 042904- ,(2006) , 10.1063/1.2168261
Xiao-hong Du, Jiehui Zheng, Uma Belegundu, Kenji Uchino, Crystal orientation dependence of piezoelectric properties of lead zirconate titanate near the morphotropic phase boundary Applied Physics Letters. ,vol. 72, pp. 2421- 2423 ,(1998) , 10.1063/1.121373
F. Calame, P. Muralt, Growth and properties of gradient free sol-gel lead zirconate titanate thin films Applied Physics Letters. ,vol. 90, pp. 062907- ,(2007) , 10.1063/1.2472529
J C Greenwood, Silicon in mechanical sensors Journal of Physics E: Scientific Instruments. ,vol. 21, pp. 1114- 1128 ,(1988) , 10.1088/0022-3735/21/12/001
M. Detalle, D. Rémiens, L. Lebrun, D. Guyomar, Electrical property evaluation of manganese-fluorine codoping of lead zirconate titanate thin films: Compatibility between hard material and piezoelectric activity Journal of Applied Physics. ,vol. 100, pp. 094102- ,(2006) , 10.1063/1.2369542
Isaku Kanno, Hidetoshi Kotera, Kiyotaka Wasa, Measurement of transverse piezoelectric properties of PZT thin films Sensors and Actuators A-physical. ,vol. 107, pp. 68- 74 ,(2003) , 10.1016/S0924-4247(03)00234-6
Tao Zhang, Kiyotaka Wasa, Isaku Kanno, Shu-Yi Zhang, Ferroelectric properties of Pb(Mn1/3Nb2/3)O3−Pb(Zr,Ti)O3 thin films epitaxially grown on (001)MgO substrates Journal of Vacuum Science and Technology. ,vol. 26, pp. 985- 990 ,(2008) , 10.1116/1.2900659
Fabrice F.C. Duval, Stephen A. Wilson, Graham Ensell, Nicolas M.P. Evanno, Markys G. Cain, Roger W. Whatmore, Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor Sensors and Actuators A: Physical. ,vol. 133, pp. 35- 44 ,(2007) , 10.1016/J.SNA.2006.03.035
Kyoung Jin Choi, Michael Biegalski, YL Li, A Sharan, J Schubert, Reinhard Uecker, P Reiche, YB Chen, XQ Pan, Venkatraman Gopalan, L-Q Chen, Darrell G Schlom, CB Eom, None, Enhancement of ferroelectricity in strained BaTiO3 thin films. Science. ,vol. 306, pp. 1005- 1009 ,(2004) , 10.1126/SCIENCE.1103218