Microinterferometer for distance measurements
作者： Fahrettin L. Degertekin , Byungki Kim , Hosein Ali Razavi , Thomas Roland Kurfess
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摘要: Several embodiments of a microinterferometer are disclosed. A first embodiment for measuring the absolute distance to an object surface includes substrate. The also phase-sensitive, reflective diffraction grating formed on is configured reflect portion incident light and transmit second light, such that diffracted. further lens substrate focusing predetermined local distance, photo-detector receiving interference patterns produced from reflected surface.
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